材料技术
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碳化硅主轴
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产品描述
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特性项目 | 碳化硅SiC | ||||||
产品编号 KemaTek No. | KMT-SSiC(R) | KMT-SSiC | KMT-SiSiC | ||||
颜色 Color |
黑色 black |
黑色 black |
黑色 black |
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主要成分含量 Main Content Percentage | - | - | - | ||||
主要特征 Main Characteristics |
高阻高导热、耐腐蚀 High Volume Resistivity,High Thermal Conductivity,and Corrosion Resistance |
较高的高温强度、耐腐蚀、好的热导率 High Temperature Strength,High Chemical Resistance,Good Thermal Conductivity |
耐磨、耐腐蚀 Good Chemical and Abrasive Resistance |
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主要用途 Main Applications |
半导体设备部件 Semiconductor Equipment Parts |
耐腐蚀件、密封件、耐高温件 Semiconductor Equipment Parts, Sealing Parts,Anti-Heat Parts |
耐磨件、耐腐蚀件 Abrasive and Corrosion Resistance Parts |
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密度 Bulk Density | g/cc | ASTM-C20 | 3.16 | 3.15 | 3.02 | ||
吸水率 Water Absorption | % | ASTM-C373 | 0 | 0 | 0 | ||
机械特性 Mechanical Characteristics |
维氏硬度 Vickers Hardness(Load 500g) |
GPa | ASTM C1327-03 | 24.0 | 28.0 | 20.0 | |
抗弯强度 Flexural Strength |
MPa | ASTM C1161-02c | 450 | 380 | 250 | ||
抗压强度 Compressive Strength |
MPa | ASTM C773 | - | 3900 | - | ||
杨氏模量 Young's Modulus of Elasticity |
GPa | ASTM C1198-01 | 420 | 410 | 330 | ||
泊松比 Poisson's Ratio |
- | ASTM C1198-01 | - | 0.14 | - | ||
断裂韧性 Fracture Toughness |
MPa·m1/2 |
ASTM C1421-01b (Kevron notched beam) |
- | 4 | - | ||
热学特性 Thermal Characteristics |
线性膨胀系数 Coefficient of Linear Thermal Expansion |
40~400°C | ×10-6/°C | ASTM C372-94 | 4.2 | 4.0 | 4.5 |
热传导率 Thermal Conductivity |
20°C | W/(m·K) | ASTM C408-88 | 170 | 120 | 45 | |
比热 Specific Heat |
J/(Kg·K)×103 | ASTM E1269 | - | 0.65 | - | ||
抗热冲击能力 Thermal Shocking Resistance |
°C | Note 1 | - | - | - | ||
电学特性 Electrical Characteristics |
体积电阻率 Volume Resistivity |
20°C | Ω·cm | ASTM D257-99 | 106 | 102~106 | - |
介电强度 Dielectric Strength |
KV/mm | ASTM D149-97 | - | - | - | ||
介电常数 Dielectric Constant(1MHz) |
- | ASTM D150-98 | - | - | - | ||
介电损耗系数 Loss Tangent(1MHz) |
×10-4 | ASTM D150-98 | - | - | - | ||
化学特性 Chemical Characteristics |
硝酸 Nitric Acid(60%) |
重量损失(WT Loss) | - | - | - | - | |
硫酸 Sulphuric Acid(95%) |
- | - | - | - | |||
氢氧化钠 Caustic(30%) |
- | - | - | - |
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发布时间:2020-11-21 14:42:37
Copyright©苏州珂玛材料科技股份有限公司
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发布时间:2020-11-21 14:43:14